“Micro Electro Mechanical Systems and Nano Electro Mechanical Systems (MEMS & NEMS)” is a course offered to students following the Degree Programme in Mechatronics Engineering.  It is a three-credit (03) course at Level 06. This course consists of three Books. Book 01 consist of Fundamentals of MEMS, MEMS Fabrication and Manufacturing Processes. Book 02 consist of Operation Principles and Applications of MEMS Devices. Book 03 consist of Fundamentals of NEMS and Operation Principles and Applications of NEMS Devices. There will be two Assignments, two Continuous Assessment Tests (CAT), Case study and Laboratory practicals which must be completed successfully by the students who are following this course.